JPH0322181Y2 - - Google Patents

Info

Publication number
JPH0322181Y2
JPH0322181Y2 JP1984027122U JP2712284U JPH0322181Y2 JP H0322181 Y2 JPH0322181 Y2 JP H0322181Y2 JP 1984027122 U JP1984027122 U JP 1984027122U JP 2712284 U JP2712284 U JP 2712284U JP H0322181 Y2 JPH0322181 Y2 JP H0322181Y2
Authority
JP
Japan
Prior art keywords
mounting
mounting table
pair
lead screw
silicon wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984027122U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60142229U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2712284U priority Critical patent/JPS60142229U/ja
Publication of JPS60142229U publication Critical patent/JPS60142229U/ja
Application granted granted Critical
Publication of JPH0322181Y2 publication Critical patent/JPH0322181Y2/ja
Granted legal-status Critical Current

Links

JP2712284U 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置 Granted JPS60142229U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2712284U JPS60142229U (ja) 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2712284U JPS60142229U (ja) 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置

Publications (2)

Publication Number Publication Date
JPS60142229U JPS60142229U (ja) 1985-09-20
JPH0322181Y2 true JPH0322181Y2 (en]) 1991-05-15

Family

ID=30523772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2712284U Granted JPS60142229U (ja) 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置

Country Status (1)

Country Link
JP (1) JPS60142229U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH085161Y2 (ja) * 1989-06-17 1996-02-14 大日本印刷株式会社 Ｉｃカードの処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586832A (ja) * 1981-06-30 1983-01-14 Shinkawa Ltd マガジン移送装置
JPS5859128A (ja) * 1981-10-01 1983-04-08 Hitachi Ltd 物品のロ−ダ、アンロ−ダ機構

Also Published As

Publication number Publication date
JPS60142229U (ja) 1985-09-20

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